PRODUCT RANGE
        
 
 
 
Systems and Equipments  
 
     
  Critical Point Drying systems for EM and MEMS Applications  
 

Supercritical point dryer systems for MEMS, Sol-Gel, Carbon Nanotubes, SEM & non clean room applications

MEMS critical point dryer: Anti-stiction solution for MEMS

 
 
1. Supercritical die and 1” wafer MEMS release tool: AUTOSAMDRI®-815,SERIES B
2. Supercritical 4” wafer MEMS release tool: AUTOSAMDRI®-815B, SERIES B
3. Supercritical CPD MEMS dryer for 4” wafer: AUTOSAMDRI®-815B, SERIES C
4. Supercritical 6” wafer MEMS release tool: AUTOMEGASAMDRI®-915B, SERIES B 
5. Supercritical 6” wafer MEMS release tool: AUTOMEGASAMDRI®-915B, SERIES C
6. Supercritical CPD MEMS dryer for 8” wafer: AUTOSAMDRI®-916B, SERIES C
7. New multi-application programmable critical point with LCD touchscreen control: Advanced 931 SAMDRI®
 
     
  EM Critical point dryer: Solution for Scanning Electron Microscope sample prep & non clean room applications  
 
1. Semi-automatic critical point dryer: SAMDRI®-795
2. Advanced manual critical point dryer: SAMDRI®-PVT-3D
3. The fully automatic critical point dryer: AUTOSAMDRI®-815, SERIES A
4. Large capacity fully automatic critical point dryer: AUTOSAMDRI®-815B, SERIES A
 
     
  For more details, please Contact MCube Technologies  
     
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